Modeling Electromagnetic Field Excitation and RF Power Absorption in Large Helicon Plasma
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- 篠原 俊二郎
- 国立大学法人九州大学
書誌事項
- タイトル
- Modeling Electromagnetic Field Excitation and RF Power Absorption in Large Helicon Plasma
- 著者
- Shunjiro Shinohara, et al.
収録刊行物
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- 7^<th> Asia Pacific Conference on Plasma Science & Technology and 17^<th> SPSM 1(to be published in J.of Thin Solid Films)
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7^<th> Asia Pacific Conference on Plasma Science & Technology and 17^<th> SPSM 1(to be published in J.of Thin Solid Films) 2004