Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
Bibliographic Information
- Title
- Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
- Author
- T.Ueta, S.Hanaki, M.Yamashita, H.Uchida
Journal
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- Proc.10^<th> Annual Meeting of IAPS
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Proc.10^<th> Annual Meeting of IAPS 101-102, 2003
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Details
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- CRID
- 1010000781785810441
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- Article Type
- journal article
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- Data Source
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- KAKEN