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Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
Bibliographic Information
- Title
- Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
- Author
- T.Ueta, S.Hanaki, M.Yamashita, H.Uchida
Journal
-
- Proc.10^<th> Annual Meeting of IAPS
-
Proc.10^<th> Annual Meeting of IAPS 101-102, 2003
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Details 詳細情報について
-
- CRID
- 1010000781785810441
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN