Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition

Bibliographic Information

Title
Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
Author
T.Ueta, S.Hanaki, M.Yamashita, H.Uchida

Journal

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Details

  • CRID
    1010000781785810441
  • Article Type
    journal article
  • Data Source
    • KAKEN

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