Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
書誌事項
- タイトル
- Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
- 著者
- T.Ueta, S.Hanaki, M.Yamashita, H.Uchida
収録刊行物
-
- Proc.10^<th> Annual Meeting of IAPS
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Proc.10^<th> Annual Meeting of IAPS 101-102, 2003