Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
書誌事項
- タイトル
- Characterization of (Ti,Al)N Films Prepared by Io Mixing and Vapor Deposition
収録刊行物
-
- Proc.10^<th> Annual Meeting of IAPS
-
Proc.10^<th> Annual Meeting of IAPS 101-102, 2003