Effect of Oxygen Addition to Methane on Growth of Vertically Oriented Carbon Nanotubes by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition
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- KATAYAMA Mitsuhiro
- Osaka University, Graduate School of Engineering, Professor
Bibliographic Information
- Title
- Effect of Oxygen Addition to Methane on Growth of Vertically Oriented Carbon Nanotubes by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition
Journal
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- Journal of Applied Physics Vol.97,No.10
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Journal of Applied Physics Vol.97,No.10 2005
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Details 詳細情報について
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- CRID
- 1010000781801335948
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- Article Type
- journal article
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- Data Source
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- KAKEN