Characterization of angstrom-scale vertical vibration of electrostatically Actuated resonators using Atomic Force Microscope in tapping mode
書誌事項
- タイトル
- Characterization of angstrom-scale vertical vibration of electrostatically Actuated resonators using Atomic Force Microscope in tapping mode
- 著者
- V.Agache, B.Legrand, K.nakamura, H.kawakatsu, L.Buchaillot, H.Toshiyoshi, D.Collard, H.Fujita
収録刊行物
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- French Science And Technology Workshop,Tokyo,Japan
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French Science And Technology Workshop,Tokyo,Japan 2004
