Characterization of angstrom-scale vertical vibration of electrostatically Actuated resonators using Atomic Force Microscope in tapping mode
Bibliographic Information
- Title
- Characterization of angstrom-scale vertical vibration of electrostatically Actuated resonators using Atomic Force Microscope in tapping mode
- Author
- V.Agache, B.Legrand, K.nakamura, H.kawakatsu, L.Buchaillot, H.Toshiyoshi, D.Collard, H.Fujita
Journal
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- French Science And Technology Workshop,Tokyo,Japan
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French Science And Technology Workshop,Tokyo,Japan 2004
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Details 詳細情報について
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- CRID
- 1010000781803217540
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- Article Type
- journal article
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- Data Source
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- KAKEN