Characterization of angstrom-scale vertical vibration of electrostatically Actuated resonators using Atomic Force Microscope in tapping mode

Bibliographic Information

Title
Characterization of angstrom-scale vertical vibration of electrostatically Actuated resonators using Atomic Force Microscope in tapping mode
Author
V.Agache, B.Legrand, K.nakamura, H.kawakatsu, L.Buchaillot, H.Toshiyoshi, D.Collard, H.Fujita
Published
2004
Resource Type
journal article

Journal

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Details 詳細情報について

  • CRID
    1010000781803217540
  • Article Type
    journal article
  • Data Source
    • KAKEN

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