Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties

Bibliographic Information

Title
Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties
Author
C.Biloiu, I.A.Biloiu, Y.Sakai, Y.Suda, A.Ohta

Journal

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Details

  • CRID
    1010000781805324675
  • Article Type
    journal article
  • Data Source
    • KAKEN

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