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Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties
Bibliographic Information
- Title
- Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties
- Author
- C.Biloiu, I.A.Biloiu, Y.Sakai, Y.Suda, A.Ohta
Journal
-
- J.Vac.Sci.Technol. 22
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J.Vac.Sci.Technol. 22 13-19, 2004
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Details 詳細情報について
-
- CRID
- 1010000781805324675
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
