Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties
書誌事項
- タイトル
- Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties
- 著者
- C.Biloiu, I.A.Biloiu, Y.Sakai, Y.Suda, A.Ohta
収録刊行物
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- J.Vac.Sci.Technol. 22
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J.Vac.Sci.Technol. 22 13-19, 2004