Fabrication of Si field emitter array in local vacuum Package
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- 澤田 和明
- 豊橋技術科学大学
書誌事項
- タイトル
- Fabrication of Si field emitter array in local vacuum Package
- 著者
- Daiji Noda, Masanori Hatakeyama, Masanori Kyogoku, Kimiya Ikushima, Kazuaki Sawada, Makoto Ishida
収録刊行物
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- 17th International Vacuum Nanoelectronics Conference, Ray and Maria Stata Center, Massachusetts Institute of Technology, Cambridge, MA, USA, 11-16 July
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17th International Vacuum Nanoelectronics Conference, Ray and Maria Stata Center, Massachusetts Institute of Technology, Cambridge, MA, USA, 11-16 July 292-293, 2004
