Planar metal-insulator-semiconductor type field emitter fabricated on an epitaxial Al/Al_2O_3/Si(111) structure
Bibliographic Information
- Title
- Planar metal-insulator-semiconductor type field emitter fabricated on an epitaxial Al/Al_2O_3/Si(111) structure
- Author
- J.S.Kim, T.Hoshi, K.Sawada, M.Ishida
Journal
-
- Journal of Vacuum Science & Technology B 22(3)
-
Journal of Vacuum Science & Technology B 22(3) 1358-1361, 2004
- Tweet
Details 詳細情報について
-
- CRID
- 1010000781805416709
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN