Focusing and Positioning of Ion Beam for Sputter Depth Profiling using a Coaxicial Sample Stage and a Dual Nano-ammter
書誌事項
- タイトル
- Focusing and Positioning of Ion Beam for Sputter Depth Profiling using a Coaxicial Sample Stage and a Dual Nano-ammter
- 著者
- M.Inoue, K.Kurahashi, K.Kodama
収録刊行物
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- J.Surf.Anal. Vol.10
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J.Surf.Anal. Vol.10 197-202, 2003