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Focusing and Positioning of Ion Beam for Sputter Depth Profiling using a Coaxicial Sample Stage and a Dual Nano-ammter
Bibliographic Information
- Title
- Focusing and Positioning of Ion Beam for Sputter Depth Profiling using a Coaxicial Sample Stage and a Dual Nano-ammter
- Author
- M.Inoue, K.Kurahashi, K.Kodama
Journal
-
- J.Surf.Anal. Vol.10
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J.Surf.Anal. Vol.10 197-202, 2003
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Details 詳細情報について
-
- CRID
- 1010000781812556806
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
