A Numerical Technique for the Analysis of MEMS Structures using the Coupling of Electromagnetic and Mechanical Equations
Bibliographic Information
- Title
- A Numerical Technique for the Analysis of MEMS Structures using the Coupling of Electromagnetic and Mechanical Equations
- Author
- Kohei Kawano, Noriyuki Miura, Michiko Kuroda, Manos M.Tentzeris
Journal
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- PIERS2004 (Progress of International Electromagnetic Research Symposium)
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PIERS2004 (Progress of International Electromagnetic Research Symposium) 2004
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Details 詳細情報について
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- CRID
- 1010000781812947468
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- Article Type
- journal article
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- Data Source
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- KAKEN
