Study on emissivity behaviors of silicon wafers at high temperature.
Bibliographic Information
- Title
- Study on emissivity behaviors of silicon wafers at high temperature.
- Author
- K.Hiraka, T.Ohkubo, T.Iuchi
Journal
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- Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February
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Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February 91-92, 2005
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Details 詳細情報について
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- CRID
- 1010000781813028000
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- Article Type
- journal article
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- Data Source
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- KAKEN
