Micro thermal sensor for nanometric surface defect inspection
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- 清水 裕樹
- 東北大学
書誌事項
- タイトル
- Micro thermal sensor for nanometric surface defect inspection
- 著者
- Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Yuan-Liu Chen, Wei Gao
収録刊行物
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- Proceedings of the 16th INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE NANO 2016)
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Proceedings of the 16th INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE NANO 2016) In Press 2016