[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Defect Formation in (0001)- and (1120)-Oriented 4H-SiC Crystals P^+-Implanted at Room Temperature

Bibliographic Information

Title
Defect Formation in (0001)- and (1120)-Oriented 4H-SiC Crystals P^+-Implanted at Room Temperature
Author
T. Okada, et. al.

Journal

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Details

  • CRID
    1010000781882224896
  • Article Type
    journal article
  • Data Source
    • KAKEN

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