Defect Formation in (0001)- and (1120)-Oriented 4H-SiC Crystals P^+-Implanted at Room Temperature
Bibliographic Information
- Title
- Defect Formation in (0001)- and (1120)-Oriented 4H-SiC Crystals P^+-Implanted at Room Temperature
- Author
- T. Okada, et. al.
Journal
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- Japanese Journal of Applied Physics Vol.43
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Japanese Journal of Applied Physics Vol.43 6884-6889, 2004
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Details
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- CRID
- 1010000781882224896
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- Article Type
- journal article
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- Data Source
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- KAKEN