Preparation of β-FeSi_2 thin Film by metal organic chemical vapor deposition using iron-carbonyl and mono-silane
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- 舟窪 浩
- 東京工業大学
書誌事項
- タイトル
- Preparation of β-FeSi_2 thin Film by metal organic chemical vapor deposition using iron-carbonyl and mono-silane
- 著者
- Kensuke Akiyama, Seishiro Ohaya, Hiroshi Funakubo
収録刊行物
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- Thin Solid Films 461
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Thin Solid Films 461 40-43, 2004