Uniform growth of GaN on AIN templated (111) Si substrate by HVPE

Bibliographic Information

Title
Uniform growth of GaN on AIN templated (111) Si substrate by HVPE
Author
Y.Honda, M.Okano, M.Yamaguchi, N.Sawaki

Journal

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Details

  • CRID
    1010000781891253248
  • Article Type
    journal article
  • Data Source
    • KAKEN

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