Electron Dynamics in Chemically Amplified Resists

Bibliographic Information

Title
Electron Dynamics in Chemically Amplified Resists
Author
T.Kozawa, H.Yamamoto, A.Nakano, A.Saeki, K.Okamoto, S.Tagawa

Journal

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Details

  • CRID
    1010000781891589504
  • Article Type
    journal article
  • Data Source
    • KAKEN

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