Electron Dynamics in Chemically Amplified Resists
Bibliographic Information
- Title
- Electron Dynamics in Chemically Amplified Resists
- Author
- T.Kozawa, H.Yamamoto, A.Nakano, A.Saeki, K.Okamoto, S.Tagawa
Journal
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- J.Photopolym.Sci.Technol. 17
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J.Photopolym.Sci.Technol. 17 733-738, 2004
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Details
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- CRID
- 1010000781891589504
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- Article Type
- journal article
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- Data Source
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- KAKEN