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Depositions and Microstructure of Mg-Si Thin Film by Ion Beam Sputtering.
Bibliographic Information
- Title
- Depositions and Microstructure of Mg-Si Thin Film by Ion Beam Sputtering.
- Author
- Katsuyoshi KONDOH
Journal
-
- Surface and Coatings Technology 200
-
Surface and Coatings Technology 200 4233-4239, 2006
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Details 詳細情報について
-
- CRID
- 1010000781940920067
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
