A Newly Developed Three-Dimensional Profile Scanner with Nanometer Spatial Resolution
書誌事項
- タイトル
- A Newly Developed Three-Dimensional Profile Scanner with Nanometer Spatial Resolution
- 著者
- Shinno Hidenori, Yoshioka Hayato, Gokan Toshimichi, Sawano Hiroshi
収録刊行物
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- Cirp Annals-Manufacturing Technology
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Cirp Annals-Manufacturing Technology Vol.59, No.1 525-528, 2010