Fabrication of High-Quality GOI and SGOI Structures by Rapid Melt Growth Method
書誌事項
- タイトル
- Fabrication of High-Quality GOI and SGOI Structures by Rapid Melt Growth Method
- 著者
- Heiji Watanabe, Takayoshi Shimura
収録刊行物
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- The Proceedings of International workshop on Active-matrix flatpanel displays and devices
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The Proceedings of International workshop on Active-matrix flatpanel displays and devices 53-56, 2010