A Multifunctional Integrated Silicon Tactile Imager with Arrays of Strain and Temperature Sensors on Single Crystal Silicon Diaphragm
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- 高尾 英邦
- 香川大学
書誌事項
- タイトル
- A Multifunctional Integrated Silicon Tactile Imager with Arrays of Strain and Temperature Sensors on Single Crystal Silicon Diaphragm
- 著者
- 高尾英邦
収録刊行物
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- Sensors and Actuators A (掲載決定)
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Sensors and Actuators A (掲載決定) 2010