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Micropatterning and crystallization of sol-gel-derived dielectric film by laser direct writing
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- WATANABE Akira
- 東北大学
Bibliographic Information
- Title
- Micropatterning and crystallization of sol-gel-derived dielectric film by laser direct writing
- Author
- Akira Watanabe
Journal
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- Proc.SPIE
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Proc.SPIE 585(7585N1) 1-8, 2010
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Details 詳細情報について
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- CRID
- 1010000782071535628
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- Article Type
- journal article
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- Data Source
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- KAKEN