Island formation of SiC film on striated Si(001) substrates

Bibliographic Information

Title
Island formation of SiC film on striated Si(001) substrates
Author
Yoshimine Kato and Kazuo Sakumoto

Journal

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Details 詳細情報について

  • CRID
    1010000782081421188
  • Article Type
    journal article
  • Data Source
    • KAKEN

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