[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

In-situ void formation technique using an AlN shell structure grown on GaN stripes on Si(111) and c-plane sapphire substrates

Bibliographic Information

Title
In-situ void formation technique using an AlN shell structure grown on GaN stripes on Si(111) and c-plane sapphire substrates
Author
Tadashi Mitsunari

Journal

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Details

  • CRID
    1010000782105471623
  • Article Type
    journal article
  • Data Source
    • KAKEN

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