Negative-type extreme ultraviolet resist materials based on water-wheel-like cyclic oligomer (noria)
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- 工藤 宏人
- 関西大学
書誌事項
- タイトル
- Negative-type extreme ultraviolet resist materials based on water-wheel-like cyclic oligomer (noria)
- 著者
- Hiroyuki Seki, Yuki kato, Hiroto Kudo, Hiroaki oizumi, Toshiro Itani, Tadatomi Nishikubo
収録刊行物
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- Jpn.J.Appl.Phys.
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Jpn.J.Appl.Phys. 49,06GF06 1-6, 2010