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Micromachining of Polymethylmethacrylate and Polydimethylsiloxane Using Laser Plasma Soft X-rays
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- MAKIMURA Tetsuya
- 筑波大学
Bibliographic Information
- Title
- Micromachining of Polymethylmethacrylate and Polydimethylsiloxane Using Laser Plasma Soft X-rays
- Author
- Tetsuya Makimura, Tatsuo Okada, 他5名
Journal
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- Journal of Laser Micro / Nanoengineering
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Journal of Laser Micro / Nanoengineering vol.6 235-238, 2011
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Details 詳細情報について
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- CRID
- 1010000782110347396
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- Article Type
- journal article
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- Data Source
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- KAKEN
