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Structural and Electrical Properties of Mg_2Si Thin Films Fabricated by Radio-Frequency Magnetron Sputtering Deposition

Bibliographic Information

Title: Structural and Electrical Properties of Mg_2Si Thin Films Fabricated by Radio-Frequency Magnetron Sputtering Deposition

Author: J. Tani and H. Kido

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Details 詳細情報について

CRID

1010000782121799044
Article Type

journal article
Data Source
- KAKEN

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