Control of Nano-structure of4けんAssisted Glancing Angle Deposition
Bibliographic Information
- Title
- Control of Nano-structure of4けんAssisted Glancing Angle Deposition
- Author
- Yoichi Hoshi, Yoiji Yasuda, and Naoto Kitahara
Journal
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- J. J. Appl. Phys
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J. J. Appl. Phys Vol.52 110124-, 2013
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Details 詳細情報について
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- CRID
- 1010000782162618247
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- Article Type
- journal article
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- Data Source
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- KAKEN