Organic solvent-free water-developable sugar resist material derived from biomass in eco-friendly green lithography
-
- 伊都 将司
- 大阪大学
書誌事項
- タイトル
- Organic solvent-free water-developable sugar resist material derived from biomass in eco-friendly green lithography
収録刊行物
-
- Microelectronic Engineering
-
Microelectronic Engineering (in press)(dx.doi.org/10.1016/j.mee.2014.02.02 6)