Highly Sensitive Trace Moisture Ball SAW Sensor Using SiOx film
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- 辻 俊宏
- 東北大学
書誌事項
- タイトル
- Highly Sensitive Trace Moisture Ball SAW Sensor Using SiOx film
- 著者
- Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Kazushi Yamanaka
収録刊行物
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- Proceedings of Symposium on Ultrasonic Electronics
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Proceedings of Symposium on Ultrasonic Electronics 34 381-382, 2013