Microstructures in directly bonded Sisubstrates
Bibliographic Information
- Title
- Microstructures in directly bonded Sisubstrates
- Author
- Y. Ohara, T. Ueda, A. Sakai, O. Nakatsuka, M. Ogawa, S. Zaima, E. Toyoda, H. Isogai, T. Senda, K. Izunome, H. Tajiri, O. Sakata, S. Kimura, T. Sakata, H. Mori
Journal
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- Solid-State Electronics 53
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Solid-State Electronics 53 837-840, 2009
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Details 詳細情報について
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- CRID
- 1010000782440633096
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- Article Type
- journal article
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- Data Source
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- KAKEN