Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing
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- YUKIHARU Uraoka
- Nara Institute of Science and Technology
Bibliographic Information
- Title
- Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing
- Author
- Yuta Sugawara, Yukiharu Uraoka, Hiroshi Yano, Tomoaki Hatayama, Takashi Fuyuki, A, Mimura
Journal
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- Japanese Journal of Applied Physics Vol. 46,No. 8
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Japanese Journal of Applied Physics Vol. 46,No. 8 2007
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Details 詳細情報について
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- CRID
- 1010000782440671130
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- Article Type
- journal article
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- Data Source
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- KAKEN
