Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing

Bibliographic Information

Title
Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing
Author
Yuta Sugawara, Yukiharu Uraoka, Hiroshi Yano, Tomoaki Hatayama, Takashi Fuyuki, A, Mimura

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Details 詳細情報について

  • CRID
    1010000782440671130
  • Article Type
    journal article
  • Data Source
    • KAKEN

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