Deposition of tungsten carbide thin films by a simultaneous RF sputtering

Bibliographic Information

Title
Deposition of tungsten carbide thin films by a simultaneous RF sputtering
Author
Y.Suda, K.Yukimura, K.Nakamura, K.Takaki, Y.Sakai

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Details 詳細情報について

  • CRID
    1010000782446596234
  • Article Type
    journal article
  • Data Source
    • KAKEN

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