Deposition of tungsten carbide thin films by a simultaneous RF sputtering
Bibliographic Information
- Title
- Deposition of tungsten carbide thin films by a simultaneous RF sputtering
- Author
- Y.Suda, K.Yukimura, K.Nakamura, K.Takaki, Y.Sakai
Journal
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- Jpn. J. Appl. Phys. 45・10B
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Jpn. J. Appl. Phys. 45・10B 8449-8852, 2006
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Details 詳細情報について
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- CRID
- 1010000782446596234
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- Article Type
- journal article
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- Data Source
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- KAKEN