Production of Large Diameter, High-Density Helicon Plasma with Short Axial Length Using a Flat Spiral Antenna

Bibliographic Information

Title
Production of Large Diameter, High-Density Helicon Plasma with Short Axial Length Using a Flat Spiral Antenna
Author
T. Motomura, K. Tanaka, S. Shinohara, and T. Tanikawa

Journal

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Details 詳細情報について

  • CRID
    1010000782474553475
  • Article Type
    journal article
  • Data Source
    • KAKEN

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