Production of Large Diameter, High-Density Helicon Plasma with Short Axial Length Using a Flat Spiral Antenna
Bibliographic Information
- Title
- Production of Large Diameter, High-Density Helicon Plasma with Short Axial Length Using a Flat Spiral Antenna
- Author
- T. Motomura, K. Tanaka, S. Shinohara, and T. Tanikawa
Journal
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- Engineering Sciences Reports, Kyushu University vol.30
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Engineering Sciences Reports, Kyushu University vol.30 29-31, 2008
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Details 詳細情報について
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- CRID
- 1010000782474553475
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- Article Type
- journal article
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- Data Source
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- KAKEN