Numerical Analysis of Pressure Dependence on Carbon Nanotube Growth in CH_4/H_2 Plasmas

Bibliographic Information

Title
Numerical Analysis of Pressure Dependence on Carbon Nanotube Growth in CH_4/H_2 Plasmas
Author
小田昭紀, 須田善行, 沖田篤士

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Details 詳細情報について

  • CRID
    1010000782485149212
  • Article Type
    journal article
  • Data Source
    • KAKEN

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