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Numerical Analysis of Pressure Dependence on Carbon Nanotube Growth in CH_4/H_2 Plasmas
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- SUDA Yoshiyuki
- Toyohashi University of Technology
Bibliographic Information
- Title
- Numerical Analysis of Pressure Dependence on Carbon Nanotube Growth in CH_4/H_2 Plasmas
- Author
- 小田昭紀, 須田善行, 沖田篤士
Journal
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- Thin Solid Films (採択済)
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Thin Solid Films (採択済) 2008
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Details 詳細情報について
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- CRID
- 1010000782485149212
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- Article Type
- journal article
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- Data Source
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- KAKEN