Fast growth of carbon nanowalls from pure methane using helicon plasma-enhanced chemical vapor deposition
Bibliographic Information
- Title
- Fast growth of carbon nanowalls from pure methane using helicon plasma-enhanced chemical vapor deposition
- Author
- Genta Sato
Journal
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- Japanese Journal of Applied Physics 45
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Japanese Journal of Applied Physics 45 5210-5212, 2006
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Details 詳細情報について
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- CRID
- 1010282256597324059
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- Article Type
- journal article
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- Data Source
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- KAKEN