Ion beam sputter-deposited ZnO thin film for broadband shear wave excitation in the GHz range
書誌事項
- タイトル
- Ion beam sputter-deposited ZnO thin film for broadband shear wave excitation in the GHz range
- 著者
- T. Yanagitani
収録刊行物
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- Proc. IEEE Ultrason. Symp. 2007
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Proc. IEEE Ultrason. Symp. 2007 1413-1416, 2007