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Threshold Ionization Mass Spectrometry of BrCN. Gas-Phase Reaction Channels Which Determine the Nitrogen Contents in the Amorphous Carbon Nitride Films
Bibliographic Information
- Title
- Threshold Ionization Mass Spectrometry of BrCN. Gas-Phase Reaction Channels Which Determine the Nitrogen Contents in the Amorphous Carbon Nitride Films
- Author
- H.Ito, A.Sato, H.Saitoh
Journal
-
- Jpn.J.Appl.Phys. 41
-
Jpn.J.Appl.Phys. 41 5449-5450, 2002
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Details 詳細情報について
-
- CRID
- 1010282256738561539
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN