Threshold Ionization Mass Spectrometry of BrCN. Gas-Phase Reaction Channels Which Determine the Nitrogen Contents in the Amorphous Carbon Nitride Films
Bibliographic Information
- Title
- Threshold Ionization Mass Spectrometry of BrCN. Gas-Phase Reaction Channels Which Determine the Nitrogen Contents in the Amorphous Carbon Nitride Films
- Author
- H.Ito, A.Sato, H.Saitoh
Journal
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- Jpn.J.Appl.Phys. 41
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Jpn.J.Appl.Phys. 41 5449-5450, 2002
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Details 詳細情報について
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- CRID
- 1010282256738561539
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- Article Type
- journal article
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- Data Source
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- KAKEN