In-situ, real-time infrared spectroscopy study of formation of porous anodic alumina on Si

  • KIMURA Yasuo
    Tohoku University, Research Institute of Electrical Communication, Research Associate

Bibliographic Information

Title
In-situ, real-time infrared spectroscopy study of formation of porous anodic alumina on Si
Author
Yasuo Kimura

Journal

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Details 詳細情報について

  • CRID
    1010282256753363970
  • Article Type
    journal article
  • Data Source
    • KAKEN

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