Comparison of organic and hydride group V precursors in terms of surface kinetics in wide-gap selective area metalorganic vapor phase epitaxy
書誌事項
- タイトル
- Comparison of organic and hydride group V precursors in terms of surface kinetics in wide-gap selective area metalorganic vapor phase epitaxy
- 著者
- Ho-Jin Oh, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
収録刊行物
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- Japanese Journal of Applied Physics vol.42, part 2, no.10A
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Japanese Journal of Applied Physics vol.42, part 2, no.10A 2003
