Surface kinetics in MOVPE of InP and InGaP analyzed by flow modulation method

Bibliographic Information

Title
Surface kinetics in MOVPE of InP and InGaP analyzed by flow modulation method
Author
Takayuki Nakano, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki

Journal

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Details 詳細情報について

  • CRID
    1010282256753485861
  • Article Type
    journal article
  • Data Source
    • KAKEN

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