Effect of temperature and substrate misorientation on the surface reaction kinetics of selective area MOVPE
書誌事項
- タイトル
- Effect of temperature and substrate misorientation on the surface reaction kinetics of selective area MOVPE
- 著者
- Haizheng Song, Xueliang Song, Masakazu Sugiyama, Yoshiaki Nakano, Yukihiro Shimogaki
収録刊行物
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- Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-17
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Conference Proceedings CD, 17th International Conference on Indium Phosphide and Related Materials(IPRM '05), Glasgow, UK, May 8-12 WP-17 1-4, 2005