CuTi合金スパッタ薄膜の機械的特性及び電気抵抗率に及ぼす 時効の効果

  • SAKURAI Junpei
    Tokyo Institute of Technology, Precistion and intelligence laboratory, Assistant Professor
  • HATA Seiichi
    Tokyo Institute of Technology, Frontier Collaborative Research Center, Associate Professor
  • SHIMOKOHBE Akira
    Tokyo Institute of Technology, Precistion and intelligence laboratory, Professor

Bibliographic Information

Title
CuTi合金スパッタ薄膜の機械的特性及び電気抵抗率に及ぼす 時効の効果
Author
桜井淳平, 秦 誠一, 下河辺明

Journal

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Details 詳細情報について

  • CRID
    1010282256778087556
  • Article Type
    journal article
  • Data Source
    • KAKEN

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