Electron cyclotron resonance multicharged ion source directly excited in a circular TE_<01> mode cavity resonator
Bibliographic Information
- Title
- Electron cyclotron resonance multicharged ion source directly excited in a circular TE_<01> mode cavity resonator
- Author
- Yushi Kato, Hideyuki Furuki, Toyohisa Asaji, Hiroshi Sasaki, Shigeyuki Ishii
Journal
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- Ion Implantation Technology - 2004 1(出版中)
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Ion Implantation Technology - 2004 1(出版中) 2005
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Details 詳細情報について
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- CRID
- 1010282256788995715
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- Article Type
- journal article
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- Data Source
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- KAKEN