Electron cyclotron resonance multicharged ion source directly excited in a circular TE_<01> mode cavity resonator
書誌事項
- タイトル
- Electron cyclotron resonance multicharged ion source directly excited in a circular TE_<01> mode cavity resonator
- 著者
- Yushi Kato, Hideyuki Furuki, Toyohisa Asaji, Hiroshi Sasaki, Shigeyuki Ishii
収録刊行物
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- Ion Implantation Technology - 2004 1(出版中)
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Ion Implantation Technology - 2004 1(出版中) 2005