Electrical Critical Dimension Measurement Method by Integration of Test Structure into MEMS Devices
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- 三田 吉郎
- 東京大学
書誌事項
- タイトル
- Electrical Critical Dimension Measurement Method by Integration of Test Structure into MEMS Devices
- 著者
- K.Ito, Yoshio Mita, M.Kubota, F.Marty, T.Bourouina, T.Shibata
収録刊行物
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- Int.Conf.on Solid-State Sensors, Actuators and Microsystems (Transducers '05)
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Int.Conf.on Solid-State Sensors, Actuators and Microsystems (Transducers '05) 2005