Fabrication of nanocone arrays by two step metal assisted chemical etching method
Bibliographic Information
- Title
- Fabrication of nanocone arrays by two step metal assisted chemical etching method
- Author
- T. Shimizu, N. Tanaka, Y. Tada, Y. Hara, N. Nakamura, J. Taniuchi, K. Takase, T. Ito, S. Shingubara
Journal
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- Microelectronic Engineering
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Microelectronic Engineering 153 55-59, 2016
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Details
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- CRID
- 1010282256820642953
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- Article Type
- journal article
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- Data Source
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- KAKEN