Plasma CVD Reactor with Two-Microwave Oscillators for Crystalline Diamond Film Synthesis
Bibliographic Information
- Title
- Plasma CVD Reactor with Two-Microwave Oscillators for Crystalline Diamond Film Synthesis
- Author
- M.Nagatsu
Journal
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- Thin Solid Film (掲載予定)
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Thin Solid Film (掲載予定) 2005
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Details 詳細情報について
-
- CRID
- 1010282256850968226
-
- Article Type
- journal article
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- Data Source
-
- KAKEN