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電気泳動法によるCMG砥石の開発とその性能評価

  • ZHOU Libo
    Ibaraki University, College of Engineering, A/Prof.
  • SHIMIZU Jun
    Ibaraki University, College of Engineering, Lecturer
  • EDA Hiroshi
    Ibaraki University, College of Engineering, Prof.

Bibliographic Information

Title
電気泳動法によるCMG砥石の開発とその性能評価
Author
周 立波, 戸井田勲, 清水 淳, 江田 弘

Journal

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Details

  • CRID
    1010282256851400711
  • Article Type
    journal article
  • Data Source
    • KAKEN

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