Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals
Bibliographic Information
- Title
- Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals
- Author
- N.Inoue, K.Masumoto, M.Shinomiya, K.Kashima, K.Eifuku, M.Koizumi, T.Takahashi, T.Takenawa, A.Karen, K.Shingu, H.Yagi
Journal
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- Semiconductor Silicon 2006 (The Electrochemical Society)
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Semiconductor Silicon 2006 (The Electrochemical Society) 453-460, 2006
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Details 詳細情報について
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- CRID
- 1010282256858942610
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- Article Type
- journal article
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- Data Source
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- KAKEN